Brief Introduction of Three-head Plasma Sputtering Coater:
CY-PSP180G-3TA is a compact three-head rotary plasma sputtering coater with a touch screen digital controller. Standard plasma sputtering target is 2 inches, for single-layer or multi-layer film. 150W DC power supply can be used for metal sputter coating, such as gold, silver and copper. Besides, this coater is equipped with a gas connection for protective gas.

Application of Three-head Plasma Sputtering Coater:
Used for metal sputter coating, such as gold, silver and copper

Technical parameter of Three-head Plasma Sputtering Coater:
Input Power Single phase 220 VAC, 50 / 60Hz
800W (including vacuum pump)
Vacuum chamber Chamber size: φ180mm*150mm
Chamber material: High purity quartz
Opening mode: Top cover removable
Sample stage Stage size: φ138mm
Rotate speed: 1 - 20rpm adjustable
Sputtering distance range: 20 - 35 mm adjustable
Sputtering head Quantity: 3
Target size requirements: 2 inches Dia. * max. 2.5 mm Thickness
Vacuum system

Mechanical pump: Double stage rotary vane pump
Pumping rate: 4 m3/h (1.1 L/S)
Ultimate vacuum: 10-1 Pa
Inlet/outlet interface: KF16
Vacuum measuring: resistance vacuum gauge
DC power supply Quantity: 1
Application: for metal sputter coating, such as gold, silver and copper
Max. output power: 150W
Dimension 360mm*300mm*470mm
Net weight ~40kg
Warranty One year limited with lifetime support

Film thickness monitor


Power supply requirement: DC 5V(±10%) Max. 400mA
Resolution: +/- 0.03Hz (5-6MHz), 0.0136Ã/ measuring (Aluminum)
Accuracy: +-/05% thickness +1
Measurement speed: 100mS-1S adjustable
Measurement range: 500 000Ã (Aluminum)
Standard sensor crystal: 6MHz
Communication interface: RS-232/485
Display precision: 8-digit LED display
Maximum dimension: 90 * 50 * 18mm (L* W * H)
Working temperature range: 0-50 °C
Humidity range: 5%-85%RH, no condensed water