Product description of 300B type small thermal evaporation coating system:
The equipment consists of a vacuum chamber, a vacuum exhaust system, a vacuum measuring system, a resistance evaporation source system, a substrate table, sample transfer, baking illumination, and the like.

Application of 300B type small thermal evaporation coating system:
For the preparation of conductive films, semiconductor films, ferroelectric films, optical films and so on.

Technical specifications of 300B type small thermal evaporation coating system:
Ultimate vacuum ≤ 6.7 *10 Pa
Recovery vacuum time pumping from 1×10 Pa to 5×10 Pa≤20min
System leakage rate 6. 7*10-7Pa.L / S
Vacuum chamber Ф450 x 350mm cylindrical vacuum chamber,
Evaporation source 2, using a resistance evaporation boat, evaporating the coating up to the bottom. The distance between the evaporation boat and the sample is 150-200 mm;
Temperature & temperature control accuracy The maximum temperature of the evaporation boat is: room temperature to 800 ° C, temperature control accuracy: ± 1 ° C; room temperature ~ 1300 ° C, temperature control accuracy: ± 2 ° C; power: 1 KW;
Sample 100 × 50 × (1 ~ 2) (thickness) mm, only one sample is plated at a time, the sample can be heated by rotation;
To ensure the firmness of the film, the sample is heated to 400 ° C (maximum temperature) during the evaporation process.

Baking temperature 400 °C digital display automatic thermocouple temperature control (high temperature furnace plate, digital display automatic thermocouple temperature control can be heated to 700 ° C)
Resistance evaporation source voltage 5V, 10V, power 2.5KW, water-cooled electrode 1~2 pairs.
Quartz crystal film thickness controller film thickness measurement range 0-999999Å