Product description of OLED dual-chamber multi-source evaporation system:
This type of equipment is a two-chamber organic, inorganic, multi-source organic and inorganic gas phase molecular deposition equipment with a glove box structure. It adopts a linear structure and consists of a metal material, an oxide growth chamber, an organic material growth chamber and a glove box. The metal material growth and the oxide growth chamber and the injection chamber/oxide growth chamber are coupled by an air lock, and the sample is manually transferred between the two growth chambers by an electric magnetic coupling device with a remote manual control box function.

Application of OLED dual-chamber multi-source evaporation system:
The system is mainly used to research EL OEL molecular organic electroluminescent device films.

Technical specifications of OLED dual-chamber multi-source evaporation system:
Organic evaporation chamber baked for about 6 hours, and the maximum vacuum for continuous pumping is better than 8.0×10 Pa
Inorganic evaporation chamber baked for about 6 hours, and the maximum vacuum for continuous pumping is better than 6.6×10 Pa
Evaporation chamber square vacuum chamber, size: 450 *400*350mm
Recovery vacuum time 6.6*10 Pa in 40 minutes (short-time exposure to the atmosphere and filling with dry nitrogen to start pumping)
Sample size 50 * 50mm or 100*100mm
With mask and mask library / metal material / oxide growth chamber With mask and mask library / metal material / oxide growth chamber
A mask library/organic material growth chamber place 1-8 high or low temperature beam source furnaces,
Pump Optional molecular pump set or cryopump combined vortex dry pump pumping system.
Quartz crystal film thickness controller film thickness measurement range 0-999999Å
Optional glove box
Computer system realize vacuum pump control function, mechanical pump and cryopump interlock. Control function, substrate rotation speed control function.