Max power 4KW
Heating zone Single zone 440mm
Working temperature ≤1200ºC
Temperature control accuracy ±1ºC
Temperature control method AI-PID 30-stage process curve, can store multiple
Tube material High purity quartz
Tube size φ80mm I.D x 1000mm L
Sealing mode Stainless steel vacuum flange
Vacuum measurement Mechanical pressure gauge
Working gas Non-corrosive gases such as hydrogen, nitrogen, argon, and oxygen

Three-way mass flowmeter
Item Detail
Valve type Stainless steel needle valve
Gas channels Three-way
Pressure range 0.05~0.3MPa
Range 0~100 SCCM (H2)
0~200 SCCM(Ar)
0~500 SCCM(CH4)
Flow control range ±1.5%
Mixing tank volume 750mL
Gas path material 304 stainless steel
Pipe interface 6.35mm Bite type joint
Power supply AC220V 50Hz