Desktop single target magnetron coater introduction:
Desktop single target magnetron coater is a high cost performance magnetron sputtering coating equipment independently developed by our company, which has the characteristics of miniaturization and standardization. The magnetron target can be selected from 1 inch and 2 inches, and customers can choose according to the size of the substrate to be plated; the power supply is 150W DC power supply, which can be used for metal sputtering coating. The coating instrument is equipped with a vent interface, which can be filled with protective gas. If the customer needs to mix gas, you can contact the staff to configure a high-precision mass flow meter to meet the needs of the experiment. The instrument is equipped with advanced turbo molecular pump set, the ultimate vacuum can reach 1.0E-5Pa, and other types of molecular pumps are also available for purchase.

Desktop single target magnetron coater applications:
The equipment can be used to prepare single-layer ferroelectric films, conductive films, alloy films, etc. Compared with similar equipment, this single-target magnetron sputtering coating instrument is compact in design, highly integrated, compact, and can be placed on a table for use. It is an ideal equipment for preparing material films in the laboratory.

Desktop single target magnetron coater technical parameters:
Reciprocating sample table size 50*100mm

Reciprocating speed 0~50mm/s
Magnetron target gun Target plane Circular flat target

Sputtering vacuum 10Pa~0.2Pa

Target diameter 2 inches

Target thickness Recommended 2 ~ 5mm

Target temperature <=65ºC
Vacuum chamber Cavity size About Φ180mm × H 215mm

Cavity material High purity quartz

Observation window Omnidirectional transparency

Opening method Removable top cover
power supply DC power supply 150W max

Quantity 1
Molecular pump system Foreline pump


Rotary vane pump VRD-4


Pumping speed 1.1L/S


Ultimate vacuum 5*10-1Pa

Molecular pump Molecular pumping speed 600L/S


Rated speed 24000rpm


Ultimate vacuum 5*10-5Pa


Vibration value <=0.1um


Start Time <=4.5min


Downtime <7min


cooling method Water cooling + air cooling
Water cooler Cooling water temperature <=37ºC

Cooling water flow rate 10L/min
Supply voltage AC220V 50Hz