Application of Vacuum Thermal Evaporation Coater

CY-1800X-EVC4 is an ultra-vacuum evaporation coater designed for coating oxygen
sensitive metallic materials, such as Gold, Sliver,Ti, Al and Ir etc, also can be used for
coating all kinds of materials. which has four evaporation heater sources and coat two
type of materials in same time at high vacuum up to 10-6 torr.

It is an excellent and cost effective coating machine for scanning probe microscopy study
and solar energy research.

Features of Vacuum Thermal Evaporation Coater

1.Hinged type cover on top with air spring sport makes target exchange easy

2.Two precision digital MFC (mass flow controller) are installed to allow two types of gases to be filled in

3.touch screen control panel

4.Made in Germany high speed turbo vacuum pump system,maxi. vacuum degree can reach 10-6 torr

5.Four evaporation boat, can caot four different metarial at same time.

Technical of Vacuum Thermal Evaporation Coater

Mode No.

CY-1800X-EVC4

Installation condition

Working temperature 25±15ºC
Humidity 55%Rh±10%Rh
Cooling water: DI water is the best
Working voltage:AC 220V, 50Hz, ground connect properly
Argon purity>99.99%. (with Φ6mm ferrule fitting)
Working square: 2 m2
Main Feature

1.Vacuum, thickness and power control are integrated into one control box

2.Independent evaporation coating current controller

3.One KF40 valve connect with mechanical pump directly, easy to take/put sample, one CF150 valve connect with turbo pump

4.Bottom of the chamber is equipped with 5 water cooled electrodes, can support 4 pieces evaporation heating boat

5. Each boat has independent baffle valve, can avoid cross contaminated

6. Chamber can equip thin film monitor system, the accuracy is 10Ã

Technical parameters

1.Working output voltage: AC 220V, 50Hz,

2.Maximum working power:≤ 3.2kw

3.Evaporation output: voltage: AC 0-8V adjustable, current: 200A

4.Chamber dimension:Φ300mm*400mm, stainless steel

5.Chamber door:Φ 200mm

6.Observation window:Φ 95mm,

7.Vacuum pump: turbo pump, speed: 600L/s

8.Vacuum degree:5.0*10-6torr( after 40 min)

9.Limited vacuum degree:5.0*10-7torr(temperature:100-150ºC)

10.Leak rate:5.0*10-7Pa/s

11.Sample stage:Φ 140mm

12.Distance between evaporation boat and sample stage: 260mm

13.Water chiller capacity: 15L/min

Dimension

650*1200*1600mm, gross weight: 350kg

Warranty

One year warranty with whole life technical support

Package

Standard PLY Wooden Box