Product description of Dual chamber multi-source evaporation coating system:
This type of equipment is a two-chamber organic, inorganic, multi-source organic and inorganic gas phase molecular deposition equipment with a glove box structure. It adopts a linear structure. It consists of a metal material growth, an oxide growth chamber, an organic material growth chamber and a glove box. Composition. The metal material growth and oxide growth chamber and the injection chamber/oxide growth chamber are coupled by an air lock, and the sample is manually transferred between the two growth chambers by an electric magnetic coupling device with a remote manual control box function.
The glove box is optional.

Application of Dual chamber multi-source evaporation coating system:
Dual chamber multi-source evaporation systemis mainly used to grow EL OEL molecular organic electroluminescent device film research work.

Technical specifications of Dual chamber multi-source evaporation coating system:
Organic evaporation chamber baked for about 6 hours, and the maximum vacuum for continuous pumping is better than 8.0×10 Pa
Inorganic evaporation chamber baked for about 6 hours, and the maximum vacuum for continuous pumping is better than 6.6×10 Pa

Evaporation chamber square vacuum chamber, size: 450 × 400 × 350mm
Recovery vacuum time 6.6 × 10 Pa in 40 minutes (short-time exposure to the atmosphere and filling with dry nitrogen to start pumping)

Sample size 50 *50mm or 100* 100mm
Round template and mask library metal material / oxide growth chamber can be placed 1-4 thermal resistance evaporation boat
Mask library organic material growth chamber can place 1-8 high temperature or low temperature beam source furnace quartz crystal diaphragm
Thickness controller film thickness measurement range 0-999999Å
Pump optional molecular pump set or cryopump combined vortex dry pump pumping system,
Glove box optional.