Product description of 400 type single chamber thermal evaporation coating system:
The vapor deposition design system mainly comprises a vacuum pumping and vacuum measuring system, a vacuum chamber system, a workpiece rack system, an evaporation source system, a film thickness testing system, an evaporation boat baffle system, a baking lighting system, a water cooling cycle and an alarm system, Design of electronic control and computer control systems, auxiliary systems, etc.

Application of 400 type single chamber thermal evaporation coating system:
For the preparation of conductive films, semiconductor films, ferroelectric films, optical films and so on.

Technical specifications of 400 type single chamber thermal evaporation coating system:
Ultimate vacuum ≤ 6.7* 10 Pa
Recovery vacuum time pumping from 1×10 Pa to 5×10 Pa≤20min
System leakage rate 6. 7*10-7Pa.L / S
Vacuum chamber Ф400 x 400mm cylindrical vacuum chamber,
Evaporation source 1-4, using resistance evaporation boat, evaporation blue, skein, beam source furnace to the bottom up evaporation coating.
Evaporation temperature heating temperature: room temperature to 1800ºC
Evaporation boat The evaporation boat is on the circumference of 100-160 mm from the center; the evaporation boat can be lifted up and down, and the adjustment range is 0-150 mm (the distance between the sample center and the crucible is 150-300 mm);
Workbench type and size sample tray diameter Φ300mm, can be placed on a small sample of 20mm diameter; sample tray has a rotation function, the speed is 0 ~ 20 rev / min, the speed is adjustable; the sample tray can swing angle, angle is 0 to 30 degrees adjustable;
Baking temperature 400°C digital display automatic thermocouple temperature control (high temperature furnace plate, digital display automatic thermocouple temperature control can be heated to 700 ºC)
Resistance evaporation source voltage 5V, 10V, power 2.5KW, water-cooled electrode 1~4 pairs
Quartz crystal film thickness controller film thickness measurement range 0-999999Å